10:00 a.m. | Plenary & ALD Innovator Award Session Welcome and Introduction |
10:15 a.m. | Meet the ALD 2020 Innovator Awardee, Mikko Ritala (University of Helsinki, Finland) |
10:30 a.m. | Selective and Atomic Scale Processes to Enable Future Nano-Electronics, Robert Clark (TEL Technology Center‚ America‚ LLC) |
11:00 a.m. | The First Application of ALD Technology in Display Industry, Hyun-Chul Choi (LG Display, South Korea) |
11:15 a.m. | Break |
11:30 am. | ALD on Powders for Catalysis, Frank Rosowski (BASF SE‚ Germany) |
12:00 p.m. | The Flip Side of the Story: Atomic Layer Etching, Keren Kanarik (Lam Research, USA) |
12:30 p.m. | JVST Best Paper Award, Closing Remarks, and Sponsor Thank You (Sponsor Slide with Platinum Shout Outs) |
12:45 p.m. | Session Over – View On Demand Presentations |
Sponsor Showcase Events
1:00 p.m. | EMD Performance Materials Join EMD Performance Materials for a Live FREE Virtual Sponsor Room Panel Discussion at 1:00 p.m. with their experts and stay up-to-date on developments in the Semiconductor world. |
2:00 p.m. | HORIBA Join HORIBA’s Live FREE Virtual Sponsor Room at 2:00 p.m. for the latest developments in: precursor characterization/process gas metrology laboratories; entire array of liquid and vapor delivery solutions; and next generation mass flow controller technology, designed specifically for ALD and ALE applications. |
3:00 p.m. | Schrödinger All are welcome to come to the Schrödinger Live FREE Virtual Sponsor Room Booth at 3:00 p.m. and compete for prizes in the Atomic Level Quiz! |