|10:00 a.m.||Plenary & ALD Innovator Award Session Welcome and Introduction|
|10:15 a.m.||Meet the ALD 2020 Innovator Awardee, Mikko Ritala (University of Helsinki, Finland)|
|10:30 a.m.||Selective and Atomic Scale Processes to Enable Future Nano-Electronics, Robert Clark (TEL Technology Center‚ America‚ LLC)|
|11:00 a.m.||The First Application of ALD Technology in Display Industry, Hyun-Chul Choi (LG Display, South Korea)|
|11:30 am.||ALD on Powders for Catalysis, Frank Rosowski (BASF SE‚ Germany)|
|12:00 p.m.||The Flip Side of the Story: Atomic Layer Etching, Keren Kanarik (Lam Research, USA)|
|12:30 p.m.||JVST Best Paper Award, Closing Remarks, and Sponsor Thank You (Sponsor Slide with Platinum Shout Outs)|
|12:45 p.m.||Session Over – View On Demand Presentations|
Sponsor Showcase Events
|1:00 p.m.||EMD Performance Materials
Join EMD Performance Materials for a Live FREE Virtual Sponsor Room Panel Discussion at 1:00 p.m. with their experts and stay up-to-date on developments in the Semiconductor world.
Join HORIBA’s Live FREE Virtual Sponsor Room at 2:00 p.m. for the latest developments in: precursor characterization/process gas metrology laboratories; entire array of liquid and vapor delivery solutions; and next generation mass flow controller technology, designed specifically for ALD and ALE applications.
All are welcome to come to the Schrödinger Live FREE Virtual Sponsor Room Booth at 3:00 p.m. and compete for prizes in the Atomic Level Quiz!